Virtual metrology of critical dimensions in etch processes based on automated dynamics–inspired analysis of complete tool signals.
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| Title: | Virtual metrology of critical dimensions in etch processes based on automated dynamics–inspired analysis of complete tool signals. |
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| Authors: | Bertelson, Samuel1 (AUTHOR) sam.bertelson@utexas.edu, Dailey, Roberto2 (AUTHOR) dailey.roberto@utexas.edu, Kim, Jinki3 (AUTHOR) jk.neo.kim@samsung.com, Djurdjanovic, Dragan1,2 (AUTHOR) dragand@me.utexas.edu |
| Source: | International Journal of Advanced Manufacturing Technology. Jun2025, Vol. 138 Issue 11, p5137-5147. 11p. |
| Database: | Academic Search Ultimate |
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