Experimental investigations into the effect of low temperature empowerment on the grooves quality of ITO conductive glass using by micro grinding. - Chu, Xi; Liu, Yin; Sun, Xingwei; Lu, Yuxuan; Dong, Haosheng; Pan, Fei; Xu, Wei; Yuan, Zewei; Mu, Shibo; Qu, Sheng (Applied Physics A: Materials Science & Processing, 2025)