Structure and properties of titanium and titanium oxide films formed on a substrate by vacuum-arc plasma-assisted method.
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| Title: | Structure and properties of titanium and titanium oxide films formed on a substrate by vacuum-arc plasma-assisted method. |
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| Authors: | Prokopenko, N. A.1 (AUTHOR) nick08_phantom@mail.ru, Petrikova, E. A.1 (AUTHOR) elizmarkova@yahoo.com, Petyukevich, M. S.2 (AUTHOR) petukevich@tpu.ru, Tolkachov, O. S.2 (AUTHOR) ost4@tpu.ru, Koval, N. N.1 (AUTHOR) koval@opee.hcei.tsc.ru, Ivanov, Yu. F.1 (AUTHOR) yufi55@mail.ru |
| Source: | Russian Physics Journal. Mar2025, Vol. 68 Issue 3, p383-391. 9p. |
| Database: | Academic Search Ultimate |
| ISSN: | 10648887 |
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| DOI: | 10.1007/s11182-025-03444-w |
