重掺锑直拉硅单晶中管道问题的数值模拟.
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| Title: | 重掺锑直拉硅单晶中管道问题的数值模拟. |
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| Alternate Title: | Numerical Simulation for Pipeline Problem of Highly Sb-Doped Czochralski Silicon Single Crystal. |
| Authors: | 李晓川1 lixc@longmenlab.com, 马三宝2, 周锋子3, 任永鹏1, 马武祥2, 梅昊天2 |
| Source: | Journal of Synthetic Crystals. Sep2025, Vol. 54 Issue 9, p1534-1546. 13p. |
| Database: | Academic Search Ultimate |
| ISSN: | 1000985X |
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| DOI: | 10.16553/j.cnki.issn1000-985x.2025.0053 |
