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Rotating compensator spectroscopic ellipsometry based on frequency division multiplexing with retardation calibration.

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Title: Rotating compensator spectroscopic ellipsometry based on frequency division multiplexing with retardation calibration.
Authors: Park, Jongkyoon1 (AUTHOR) qkrwhdrbs@kriss.re.kr, Gliserin, Alexander2 (AUTHOR), Choi, Sukhyun1 (AUTHOR), Cho, Yong Jai1 (AUTHOR), Chegal, Won1,3 (AUTHOR) wchegal@kriss.re.kr
Source: Scientific Reports. 11/27/2025, Vol. 15 Issue 1, p1-12. 12p.
Database: Academic Search Ultimate
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ISSN:20452322
DOI:10.1038/s41598-025-26575-z