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Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber †.

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Title: Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber †.
Authors: Avraham, Moshe1 (AUTHOR), Nemirovsky, Yael1 (AUTHOR) nemirov@ee.technion.ac.il
Source: Sensors (14248220). Nov2025, Vol. 25 Issue 22, p6819. 24p.
Database: Academic Search Ultimate
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  Data: Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber †.
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%2814248220%29%22">Sensors (14248220)</searchLink>. Nov2025, Vol. 25 Issue 22, p6819. 24p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=189676304
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        Value: 10.3390/s25226819
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              Text: Nov2025
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