Improved dispersion control and gate stability in scaled RF GaN HEMTs using ALD TiN gate. - Bai, Ruixin; Seshadri, Parthasarathy; Chen, Jiahao; Mukhopadhyay, Swarnav; Li, Chenglong; Pasayat, Shubhra S.; Gupta, Chirag (APL Electronic Devices, 2025)