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Doping Profile Meter for Semiconductor Structures.

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Title: Doping Profile Meter for Semiconductor Structures.
Authors: Manyakhin, Fedor1, Varlamov, Dmitry2, Morketsova, Lyudmila3, Skvortsov, Arkady1 skvortsovaa2009@hotmail.com, Nikolaev, Vladimir4
Source: Measurement. Jan-Mar2026, Vol. 24 Issue 1, p40-49. 10p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 191136404
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Doping Profile Meter for Semiconductor Structures.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Manyakhin%2C+Fedor%22">Manyakhin, Fedor</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Varlamov%2C+Dmitry%22">Varlamov, Dmitry</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Morketsova%2C+Lyudmila%22">Morketsova, Lyudmila</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Skvortsov%2C+Arkady%22">Skvortsov, Arkady</searchLink><relatesTo>1</relatesTo><i> skvortsovaa2009@hotmail.com</i><br /><searchLink fieldCode="AR" term="%22Nikolaev%2C+Vladimir%22">Nikolaev, Vladimir</searchLink><relatesTo>4</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Measurement%22">Measurement</searchLink>. Jan-Mar2026, Vol. 24 Issue 1, p40-49. 10p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=191136404
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1080/15366367.2024.2390340
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 10
        StartPage: 40
    Titles:
      – TitleFull: Doping Profile Meter for Semiconductor Structures.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Manyakhin, Fedor
      – PersonEntity:
          Name:
            NameFull: Varlamov, Dmitry
      – PersonEntity:
          Name:
            NameFull: Morketsova, Lyudmila
      – PersonEntity:
          Name:
            NameFull: Skvortsov, Arkady
      – PersonEntity:
          Name:
            NameFull: Nikolaev, Vladimir
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 01
              Text: Jan-Mar2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 15366367
          Numbering:
            – Type: volume
              Value: 24
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Measurement
              Type: main
ResultId 1