Controlled Cross‐Linking for Water Developable Hf‐Based Dry Resist Prepared via Molecular Layer Deposition.
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| Title: | Controlled Cross‐Linking for Water Developable Hf‐Based Dry Resist Prepared via Molecular Layer Deposition. |
|---|---|
| Authors: | Wang, Yixian1,2 (AUTHOR), Shi, Chao1,2 (AUTHOR), Liu, Bin1,2 (AUTHOR), Li, Linyang1,2 (AUTHOR), Wang, Chujun1,2,3,4,5 (AUTHOR), Cai, Yuan1,6 (AUTHOR), Guo, Lanxin1,2 (AUTHOR), Pan, Jian7 (AUTHOR), Gong, Hu7 (AUTHOR), Wang, Tuo1,2,3,4,5 (AUTHOR) wangtuo@tju.edu.cn, Gong, Jinlong1,2,8,9 (AUTHOR) |
| Source: | Small Structures. Jan2026, Vol. 7 Issue 1, p1-12. 12p. |
| Database: | Academic Search Ultimate |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 191257098 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Controlled Cross‐Linking for Water Developable Hf‐Based Dry Resist Prepared via Molecular Layer Deposition. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Wang%2C+Yixian%22">Wang, Yixian</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Shi%2C+Chao%22">Shi, Chao</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Liu%2C+Bin%22">Liu, Bin</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Li%2C+Linyang%22">Li, Linyang</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Chujun%22">Wang, Chujun</searchLink><relatesTo>1,2,3,4,5</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Cai%2C+Yuan%22">Cai, Yuan</searchLink><relatesTo>1,6</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Guo%2C+Lanxin%22">Guo, Lanxin</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Pan%2C+Jian%22">Pan, Jian</searchLink><relatesTo>7</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Gong%2C+Hu%22">Gong, Hu</searchLink><relatesTo>7</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Tuo%22">Wang, Tuo</searchLink><relatesTo>1,2,3,4,5</relatesTo> (AUTHOR)<i> wangtuo@tju.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Gong%2C+Jinlong%22">Gong, Jinlong</searchLink><relatesTo>1,2,8,9</relatesTo> (AUTHOR) – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Small+Structures%22">Small Structures</searchLink>. Jan2026, Vol. 7 Issue 1, p1-12. 12p. |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=191257098 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1002/sstr.202500778 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 12 StartPage: 1 Titles: – TitleFull: Controlled Cross‐Linking for Water Developable Hf‐Based Dry Resist Prepared via Molecular Layer Deposition. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Wang, Yixian – PersonEntity: Name: NameFull: Shi, Chao – PersonEntity: Name: NameFull: Liu, Bin – PersonEntity: Name: NameFull: Li, Linyang – PersonEntity: Name: NameFull: Wang, Chujun – PersonEntity: Name: NameFull: Cai, Yuan – PersonEntity: Name: NameFull: Guo, Lanxin – PersonEntity: Name: NameFull: Pan, Jian – PersonEntity: Name: NameFull: Gong, Hu – PersonEntity: Name: NameFull: Wang, Tuo – PersonEntity: Name: NameFull: Gong, Jinlong IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 01 Text: Jan2026 Type: published Y: 2026 Identifiers: – Type: issn-print Value: 26884062 Numbering: – Type: volume Value: 7 – Type: issue Value: 1 Titles: – TitleFull: Small Structures Type: main |
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