Controlled Cross‐Linking for Water Developable Hf‐Based Dry Resist Prepared via Molecular Layer Deposition. - Wang, Yixian; Shi, Chao; Liu, Bin; Li, Linyang; Wang, Chujun; Cai, Yuan; Guo, Lanxin; Pan, Jian; Gong, Hu; Wang, Tuo; Gong, Jinlong (Small Structures, 2026)