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Optimizing the crystallinity of ZrO2 gate insulator in indium gallium zinc oxide thin-film transistors through atomic layer deposition process temperature control.

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Title: Optimizing the crystallinity of ZrO2 gate insulator in indium gallium zinc oxide thin-film transistors through atomic layer deposition process temperature control.
Authors: Jeong, Hanseok1 (AUTHOR), Yoo, Soo Min1 (AUTHOR), Choe, Minki2 (AUTHOR), Baek, In-Hwan2 (AUTHOR) baek@inha.ac.kr, Jeon, Woojin1 (AUTHOR) woojin.jeon@khu.ac.kr
Source: Scientific Reports. 11/25/2025, Vol. 15 Issue 1, p1-9. 9p.
Database: Academic Search Ultimate
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  Data: Optimizing the crystallinity of ZrO<subscript>2</subscript> gate insulator in indium gallium zinc oxide thin-film transistors through atomic layer deposition process temperature control.
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  Data: <searchLink fieldCode="AR" term="%22Jeong%2C+Hanseok%22">Jeong, Hanseok</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Yoo%2C+Soo+Min%22">Yoo, Soo Min</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Choe%2C+Minki%22">Choe, Minki</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Baek%2C+In-Hwan%22">Baek, In-Hwan</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> baek@inha.ac.kr</i><br /><searchLink fieldCode="AR" term="%22Jeon%2C+Woojin%22">Jeon, Woojin</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> woojin.jeon@khu.ac.kr</i>
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  Data: <searchLink fieldCode="JN" term="%22Scientific+Reports%22">Scientific Reports</searchLink>. 11/25/2025, Vol. 15 Issue 1, p1-9. 9p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=192686212
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        Value: 10.1038/s41598-025-25938-w
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              Text: 11/25/2025
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              Y: 2025
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