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PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates.

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Title: PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates.
Authors: Nakamura, Kae1,2 (AUTHOR), Huang, Chi-Luen2,3 (AUTHOR), Habib Akhyari, Ali1,2,3 (AUTHOR), Argüelles, Andrea P.2,3,4 (AUTHOR), Jackson, Thomas N.1,4 (AUTHOR), Trolier-McKinstry, Susan1,2 (AUTHOR)
Source: Sensors (14248220). Apr2026, Vol. 26 Issue 7, p2246. 12p.
Database: Academic Search Ultimate
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  Data: PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates.
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  Data: <searchLink fieldCode="JN" term="%22Sensors+%2814248220%29%22">Sensors (14248220)</searchLink>. Apr2026, Vol. 26 Issue 7, p2246. 12p.
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        Value: 10.3390/s26072246
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        Text: English
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              Text: Apr2026
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              Y: 2026
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