Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing.
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| Title: | Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing. |
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| Authors: | Wich, Manfred1 (AUTHOR) manfred.wich@imtek.uni-freiburg.de, Helmerich, Jan1,2 (AUTHOR), Ott, Philipp2,3 (AUTHOR), Ambacher, Oliver1,2 (AUTHOR), Rupitsch, Stefan Johann1,2,3 (AUTHOR) |
| Source: | Materials (1996-1944). May2026, Vol. 19 Issue 9, p1782. 28p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 19961944 |
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| DOI: | 10.3390/ma19091782 |
