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Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing.

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Title: Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing.
Authors: Wich, Manfred1 (AUTHOR) manfred.wich@imtek.uni-freiburg.de, Helmerich, Jan1,2 (AUTHOR), Ott, Philipp2,3 (AUTHOR), Ambacher, Oliver1,2 (AUTHOR), Rupitsch, Stefan Johann1,2,3 (AUTHOR)
Source: Materials (1996-1944). May2026, Vol. 19 Issue 9, p1782. 28p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 193715588
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PubType: Academic Journal
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  Data: Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing.
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  Data: <searchLink fieldCode="JN" term="%22Materials+%281996-1944%29%22">Materials (1996-1944)</searchLink>. May2026, Vol. 19 Issue 9, p1782. 28p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=193715588
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        Value: 10.3390/ma19091782
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      – Code: eng
        Text: English
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        StartPage: 1782
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      – TitleFull: Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing.
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              Text: May2026
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              Y: 2026
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              Value: 19
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