Peak shift in depth profiling: Unraveling the influence of film thickness and sputtered crater in glow discharge spectrometry depth profiles.
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| Title: | Peak shift in depth profiling: Unraveling the influence of film thickness and sputtered crater in glow discharge spectrometry depth profiles. |
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| Authors: | Liu, Gong-Wen1 (AUTHOR), Cai, Yu-Xin1 (AUTHOR), Huang, Wei-Nan1 (AUTHOR), Guo, Rong-Rong2 (AUTHOR), Li, Yu3 (AUTHOR), Tang, Yu4 (AUTHOR), Lian, Song-You1 (AUTHOR) sylian1@stu.edu.cn, Wang, Jiang-Yong1,5 (AUTHOR) 15017214200@163.com |
| Source: | Spectrochimica Acta Part B. Jul2026, Vol. 241, pN.PAG-N.PAG. 1p. |
| Database: | Academic Search Ultimate |
| ISSN: | 05848547 |
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| DOI: | 10.1016/j.sab.2026.107525 |
