Hillock formation on high-temperature annealed AlN templates due to dislocation nucleation at AlON particles. - Lachowski, A.; Remmele, T.; Kwasniewski, A.; Hartmann, C.; Żak, M.; Smalc-Koziorowska, J.; Petkovic, M.; Albrecht, M.; Schulz, T. (Applied Physics Letters, 2026)