200 mm wafer-scale integration of bilayer wurtzite ferroelectric AlScN exhibiting effective d33,f > 26.8 pm/V and e31,f > 4.6 C/m2.
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| Title: | 200 mm wafer-scale integration of bilayer wurtzite ferroelectric AlScN exhibiting effective d |
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| Authors: | Nayak, Sanjay1 sanjaynayak.physu@gmail.com, Picco, Andrea2, Piot, Adrien1, Ali, Washim Reza1, Nallagatla, Venkata Raveendra1, Bisht, Ravindra Singh1, Solonenko, Dmytro1, Henzen, Demian3, Lazzari, Carla Maria2, Serafini, Andrea2, Codegoni, Davide2, Balsamo, Amalia4, Scaldaferri, Rossana4, Allahyari, Elaheh4, Ghosh, Anirban1, Kratzer, Martin3, Costantini, Sonia2, Rusconi, Andrea5, De Pastina, Annalisa1, Moridi, Mohssen1 |
| Source: | Journal of Applied Physics. 6/21/2026, Vol. 139 Issue 23, p1-9. 9p. |
| Database: | Academic Search Ultimate |
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