Characterization of subsurface damage in fused silica using non-destructive optical coherence tomography and a destructive approach by iterative plasma jet etching.

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Title: Characterization of subsurface damage in fused silica using non-destructive optical coherence tomography and a destructive approach by iterative plasma jet etching.
Authors: Frank, Samson1 (AUTHOR) samson.frank@eah-jena.de, Müller, Heike2 (AUTHOR), Zhang, Wei1 (AUTHOR), Thelemann, Dennis1 (AUTHOR), Arnold, Thomas2,3 (AUTHOR), Bliedtner, Jens1 (AUTHOR)
Source: Journal of the European Optical Society. 2026, Vol. 22 Issue 1, p1-11. 11p.
Database: Academic Search Ultimate
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ISSN:19902573
DOI:10.1051/jeos/2026015