Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range. - Siefke, Thomas; Gerold, Kristin; Shestaeva, Svetlana; Paul, Pallabi; Alam, Shawon; Franta, Daniel; Szeghalmi, Adriana; Schröder, Sven; Kroker, Stefanie (Journal of the European Optical Society, 2026)