Effect of substrate material on the structure of carbon films obtained by plasmachemical deposition.
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| Title: | Effect of substrate material on the structure of carbon films obtained by plasmachemical deposition. |
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| Authors: | Tyurnina, A. V.1, Zolotukhin, A. A.1, Obraztsov, A. N.1 obraz@polly.phys.msu.ru |
| Source: | Technical Physics Letters. Sep2006, Vol. 32 Issue 9, p735-737. 3p. 1 Diagram, 1 Graph. |
| Database: | Academic Search Ultimate |
| ISSN: | 10637850 |
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| DOI: | 10.1134/S106378500609001X |
