Electrical characterization of He-ion implantation-induced deep levels in p...n InP junctions.
Saved in:
| Title: | Electrical characterization of He-ion implantation-induced deep levels in p...n InP junctions. |
|---|---|
| Authors: | Quintanilla, L., Pinacho, R. |
| Source: | Journal of Applied Physics. 11/1/1999, Vol. 86 Issue 9, p4855. 6p. 5 Graphs. |
| Database: | Academic Search Ultimate |
| ISSN: | 00218979 |
|---|---|
| DOI: | 10.1063/1.371452 |
