A MEMS Singlet Oxygen Generator Part II: Experimental Exploration of the Performance Space. - Hill, Tyrone F.; Velásquez-García, Luis Fernando; Wilhite, Benjamin A.; Rawlins, W. Terry; Seonkyung Lee; Davis, Steven J.; Jensen, Klavs F.; Epstein, Alan H.; Livermore, Carol (Journal of Microelectromechanical Systems, 2007)