Defect reduction of GaAs/Si epitaxy by aspect ratio trapping.
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| Title: | Defect reduction of GaAs/Si epitaxy by aspect ratio trapping. |
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| Authors: | Li, J. Z.1, Bai, J.1, Major, C.1, Carroll, M.1, Lochtefeld, A.1, Shellenbarger, Z.2 |
| Source: | Journal of Applied Physics. May2008, Vol. 103 Issue 10, p106102. 3p. 3 Diagrams, 1 Graph. |
| Database: | Academic Search Ultimate |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.2924410 |
