Si/SiC bonded wafer: A route to carbon free SiO2 on SiC.
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| Title: | Si/SiC bonded wafer: A route to carbon free SiO |
|---|---|
| Authors: | Pérez-Tomás, A.1,2 amador.perez@cnm.es, Lodzinski, M.3, Guy, O. J.3, Jennings, M. R.1, Placidi, M.2, Llobet, J.2, Gammon, P. M.1, Davis, M. C.1, Covington, J. A.1, Burrows, S. E.4, Mawby, P. A.1 |
| Source: | Applied Physics Letters. 3/9/2009, Vol. 94 Issue 10, pN.PAG. 3p. 1 Black and White Photograph, 3 Graphs. |
| Database: | Academic Search Ultimate |
| FullText | Text: Availability: 0 |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 37043671 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=37043671 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.3099018 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 3 StartPage: N.PAG Titles: – TitleFull: Si/SiC bonded wafer: A route to carbon free SiO2 on SiC. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Pérez-Tomás, A. – PersonEntity: Name: NameFull: Lodzinski, M. – PersonEntity: Name: NameFull: Guy, O. J. – PersonEntity: Name: NameFull: Jennings, M. R. – PersonEntity: Name: NameFull: Placidi, M. – PersonEntity: Name: NameFull: Llobet, J. – PersonEntity: Name: NameFull: Gammon, P. M. – PersonEntity: Name: NameFull: Davis, M. C. – PersonEntity: Name: NameFull: Covington, J. A. – PersonEntity: Name: NameFull: Burrows, S. E. – PersonEntity: Name: NameFull: Mawby, P. A. IsPartOfRelationships: – BibEntity: Dates: – D: 09 M: 03 Text: 3/9/2009 Type: published Y: 2009 Identifiers: – Type: issn-print Value: 00036951 Numbering: – Type: volume Value: 94 – Type: issue Value: 10 Titles: – TitleFull: Applied Physics Letters Type: main |
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