Gas-assisted focused-ion-beam lithography of a diamond (100) surface.
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| Title: | Gas-assisted focused-ion-beam lithography of a diamond (100) surface. |
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| Authors: | Datta, A., Yuh-Renn Wu |
| Source: | Applied Physics Letters. 10/25/1999, Vol. 75 Issue 17, p2677. 3p. 6 Graphs. |
| Database: | Academic Search Ultimate |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.125116 |
