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Selective area oxide desorption by electron irradiation in a H[sub 2] ambient on GaAs (100).

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Bibliographic Details
Title: Selective area oxide desorption by electron irradiation in a H[sub 2] ambient on GaAs (100).
Authors: Brown, S.J., Burke, T.M., Smith, M.P., Ritchie, D.A., Pepper, M., Tang, K.B.T., Palmer, R.E.
Source: Applied Physics Letters. 2/15/1999, Vol. 74 Issue 7, p950. 3p. 1 Black and White Photograph, 2 Graphs.
Database: Academic Search Ultimate
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