APA (7th ed.) Citation

Nutsch, A., Beckhoff, B., Bedana, G., Borionetti, G., Codegoni, D., Grasso, S., . . . Frey, L. (2009). Characterization of Organic Contamination in Semiconductor Manufacturing Processes. AIP Conference Proceedings, 1173(1), 23. https://doi.org/10.1063/1.3251227

Chicago Style (17th ed.) Citation

Nutsch, A., et al. "Characterization of Organic Contamination in Semiconductor Manufacturing Processes." AIP Conference Proceedings 1173, no. 1 (2009): 23. https://doi.org/10.1063/1.3251227.

MLA (9th ed.) Citation

Nutsch, A., et al. "Characterization of Organic Contamination in Semiconductor Manufacturing Processes." AIP Conference Proceedings, vol. 1173, no. 1, 2009, p. 23, https://doi.org/10.1063/1.3251227.