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Characterization of Organic Contamination in Semiconductor Manufacturing Processes.

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Title: Characterization of Organic Contamination in Semiconductor Manufacturing Processes.
Authors: Nutsch, A.1, Beckhoff, B.2, Bedana, G.3, Borionetti, G.3, Codegoni, D.4, Grasso, S.4, Guerinoni, G.3, Leibold, A.1, Müller, M.2, Otto, M.1, Pfitzner, L.1, Polignano, M.-L.4, De Simone, D.4, Frey, L.1
Source: AIP Conference Proceedings. 9/28/2009, Vol. 1173 Issue 1, p23-28. 6p. 1 Chart, 6 Graphs.
Database: Academic Search Ultimate
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DbLabel: Academic Search Ultimate
An: 44642575
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PubType: Conference
PubTypeId: conference
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Characterization of Organic Contamination in Semiconductor Manufacturing Processes.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Nutsch%2C+A%2E%22">Nutsch, A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Beckhoff%2C+B%2E%22">Beckhoff, B.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Bedana%2C+G%2E%22">Bedana, G.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Borionetti%2C+G%2E%22">Borionetti, G.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Codegoni%2C+D%2E%22">Codegoni, D.</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AR" term="%22Grasso%2C+S%2E%22">Grasso, S.</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AR" term="%22Guerinoni%2C+G%2E%22">Guerinoni, G.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Leibold%2C+A%2E%22">Leibold, A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Müller%2C+M%2E%22">Müller, M.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Otto%2C+M%2E%22">Otto, M.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Pfitzner%2C+L%2E%22">Pfitzner, L.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Polignano%2C+M%2E-L%2E%22">Polignano, M.-L.</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AR" term="%22De+Simone%2C+D%2E%22">De Simone, D.</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AR" term="%22Frey%2C+L%2E%22">Frey, L.</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22AIP+Conference+Proceedings%22">AIP Conference Proceedings</searchLink>. 9/28/2009, Vol. 1173 Issue 1, p23-28. 6p. 1 Chart, 6 Graphs.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=44642575
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.3251227
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 23
    Titles:
      – TitleFull: Characterization of Organic Contamination in Semiconductor Manufacturing Processes.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Nutsch, A.
      – PersonEntity:
          Name:
            NameFull: Beckhoff, B.
      – PersonEntity:
          Name:
            NameFull: Bedana, G.
      – PersonEntity:
          Name:
            NameFull: Borionetti, G.
      – PersonEntity:
          Name:
            NameFull: Codegoni, D.
      – PersonEntity:
          Name:
            NameFull: Grasso, S.
      – PersonEntity:
          Name:
            NameFull: Guerinoni, G.
      – PersonEntity:
          Name:
            NameFull: Leibold, A.
      – PersonEntity:
          Name:
            NameFull: Müller, M.
      – PersonEntity:
          Name:
            NameFull: Otto, M.
      – PersonEntity:
          Name:
            NameFull: Pfitzner, L.
      – PersonEntity:
          Name:
            NameFull: Polignano, M.-L.
      – PersonEntity:
          Name:
            NameFull: De Simone, D.
      – PersonEntity:
          Name:
            NameFull: Frey, L.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 28
              M: 09
              Text: 9/28/2009
              Type: published
              Y: 2009
          Identifiers:
            – Type: issn-print
              Value: 0094243X
          Numbering:
            – Type: volume
              Value: 1173
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: AIP Conference Proceedings
              Type: main
ResultId 1