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Characterization of Organic Contamination in Semiconductor Manufacturing Processes.

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Bibliographic Details
Title: Characterization of Organic Contamination in Semiconductor Manufacturing Processes.
Authors: Nutsch, A.1, Beckhoff, B.2, Bedana, G.3, Borionetti, G.3, Codegoni, D.4, Grasso, S.4, Guerinoni, G.3, Leibold, A.1, Müller, M.2, Otto, M.1, Pfitzner, L.1, Polignano, M.-L.4, De Simone, D.4, Frey, L.1
Source: AIP Conference Proceedings. 9/28/2009, Vol. 1173 Issue 1, p23-28. 6p. 1 Chart, 6 Graphs.
Database: Academic Search Ultimate
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