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The Impact Of Organic Contamination On The Oxide-Silicon Interface.

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Bibliographic Details
Title: The Impact Of Organic Contamination On The Oxide-Silicon Interface.
Authors: Codegoni, D.1, Polignano, M. L.1, Castellano, L.1, Borionetti, G.2, Bonoli, F.2, Nutsch, A.3, Leibold, A.3, Otto, M.3
Source: AIP Conference Proceedings. 11/15/2011, Vol. 1395 Issue 1, p217-221. 5p.
Database: Academic Search Ultimate
Description
ISSN:0094243X
DOI:10.1063/1.3657894