View in EDS

Measuring MEMS vibration with novel quasi-heterodyned laser interferometry.

Saved in:

Bibliographic Details
Title:	Measuring MEMS vibration with novel quasi-heterodyned laser interferometry.
Authors:	Styk, Adam¹, Lambelet, Patrick², Paris, Roman³, Kujawinska, Małgorzata¹
Source:	AIP Conference Proceedings. 6/13/2012, Vol. 1457 Issue 1, p88-94. 7p. 1 Color Photograph, 1 Diagram, 1 Chart, 3 Graphs.
Database:	Academic Search Ultimate

Description
ISSN:	0094243X
DOI:	10.1063/1.4730546