Rapid thermal oxidation of epitaxial SiGe thin films
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| Title: | Rapid thermal oxidation of epitaxial SiGe thin films |
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| Authors: | Terrasi, A.1,2 terrasi@ct.infn.it, Scalese, S.2, Adorno, R.1, Ferlito, E.1, Spadafora, M.1, Rimini, E.1,2 |
| Source: | Materials Science & Engineering: B. Feb2002, Vol. 89 Issue 1-3, p269. 5p. |
| Database: | Academic Search Ultimate |
| ISSN: | 09215107 |
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| DOI: | 10.1016/S0921-5107(01)00797-8 |
