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Rapid thermal oxidation of epitaxial SiGe thin films

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Bibliographic Details
Title: Rapid thermal oxidation of epitaxial SiGe thin films
Authors: Terrasi, A.1,2 terrasi@ct.infn.it, Scalese, S.2, Adorno, R.1, Ferlito, E.1, Spadafora, M.1, Rimini, E.1,2
Source: Materials Science & Engineering: B. Feb2002, Vol. 89 Issue 1-3, p269. 5p.
Database: Academic Search Ultimate
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