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BF3 PIII modeling: Implantation, amorphisation and diffusion.

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Bibliographic Details
Title: BF3 PIII modeling: Implantation, amorphisation and diffusion.
Authors: Essa, Z.1 zahi.essa@st.com, Cristiano, F.2, Spiegel, Y.3, Boulenc, P.4, Qiu, Y.2, Quillec, M.5, Taleb, N.5, Burenkov, A.6, Hackenberg, M.6, Bedel-Pereira, E.2, Mortet, V.2, Torregrosa, Frank3, Tavernier, C.4
Source: AIP Conference Proceedings. Nov2012, Vol. 1496 Issue 1, p237-240. 4p.
Database: Academic Search Ultimate
Description
ISSN:0094243X
DOI:10.1063/1.4766532