BF3 PIII modeling: Implantation, amorphisation and diffusion.
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| Title: | BF |
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| Authors: | Essa, Z.1 zahi.essa@st.com, Cristiano, F.2, Spiegel, Y.3, Boulenc, P.4, Qiu, Y.2, Quillec, M.5, Taleb, N.5, Burenkov, A.6, Hackenberg, M.6, Bedel-Pereira, E.2, Mortet, V.2, Torregrosa, Frank3, Tavernier, C.4 |
| Source: | AIP Conference Proceedings. Nov2012, Vol. 1496 Issue 1, p237-240. 4p. |
| Database: | Academic Search Ultimate |
| FullText | Text: Availability: 0 |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 83255797 AccessLevel: 2 PubType: Conference PubTypeId: conference PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=83255797 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.4766532 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 4 StartPage: 237 Titles: – TitleFull: BF3 PIII modeling: Implantation, amorphisation and diffusion. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Essa, Z. – PersonEntity: Name: NameFull: Cristiano, F. – PersonEntity: Name: NameFull: Spiegel, Y. – PersonEntity: Name: NameFull: Boulenc, P. – PersonEntity: Name: NameFull: Qiu, Y. – PersonEntity: Name: NameFull: Quillec, M. – PersonEntity: Name: NameFull: Taleb, N. – PersonEntity: Name: NameFull: Burenkov, A. – PersonEntity: Name: NameFull: Hackenberg, M. – PersonEntity: Name: NameFull: Bedel-Pereira, E. – PersonEntity: Name: NameFull: Mortet, V. – PersonEntity: Name: NameFull: Torregrosa, Frank – PersonEntity: Name: NameFull: Tavernier, C. IsPartOfRelationships: – BibEntity: Dates: – D: 02 M: 11 Text: Nov2012 Type: published Y: 2012 Identifiers: – Type: issn-print Value: 0094243X Numbering: – Type: volume Value: 1496 – Type: issue Value: 1 Titles: – TitleFull: AIP Conference Proceedings Type: main |
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