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Large boron-interstitial cluster modelling in BF3 plasma implanted silicon.

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Title: Large boron-interstitial cluster modelling in BF3 plasma implanted silicon.
Authors: Essa, Z.1,2,3, Cristiano, F.2,3, Spiegel, Y.4, Qiu, Y.2,3, Boulenc, P.1, Quillec, M.5, Taleb, N.5, Zographos, N.6, Bedel-Pereira, E.2,3, Mortet, V.2,3, Burenkov, A.7, Hackenberg, M.7, Torregrosa, F.4, Tavernier, C.1
Source: Physica Status Solidi (C). Jan2014, Vol. 11 Issue 1, p117-120. 4p.
Database: Academic Search Ultimate
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DbLabel: Academic Search Ultimate
An: 93790075
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PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Large boron-interstitial cluster modelling in BF<subscript>3</subscript> plasma implanted silicon.
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        Value: 10.1002/pssc.201300165
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        Text: English
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        StartPage: 117
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      – TitleFull: Large boron-interstitial cluster modelling in BF3 plasma implanted silicon.
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              Text: Jan2014
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              Y: 2014
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