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Extended Defect Generation by Xenon implantation in Silicon.

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Bibliographic Details
Title: Extended Defect Generation by Xenon implantation in Silicon.
Authors: Mica, I.1,2, Polignano, M. L.1,2, Mauri, A. G.1, Codegoni, D.1,2, Grasso, S.1,2, Pozzi, C.1,2, Soncini, V.1, Targa, P.1,2, Vad, K.3
Source: AIP Conference Proceedings. 2014, Vol. 1583, p64-68. 5p. 1 Black and White Photograph, 4 Charts, 2 Graphs.
Database: Academic Search Ultimate
Description
ISSN:0094243X
DOI:10.1063/1.4865606