High-efficiency clean EUV plasma source at 10–30 nm, driven by a long-pulse-width excimer laser.
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| Title: | High-efficiency clean EUV plasma source at 10–30 nm, driven by a long-pulse-width excimer laser. |
|---|---|
| Authors: | Bollanti, S., Bonfigli, F., Burattini, E., Di Lazzaro, P., Flora, F., Grilli, A., Letardi, T., Lisi, N., Marinai, A., Mezi, L., Murra, D., Zheng, C. |
| Source: | Applied Physics B: Lasers & Optics. 2003, Vol. 76 Issue 3, p277. 8p. |
| Database: | Academic Search Ultimate |
| FullText | Links: – Type: pdflink Text: Availability: 0 |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 9527286 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=9527286 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s00340-002-1088-0 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 8 StartPage: 277 Titles: – TitleFull: High-efficiency clean EUV plasma source at 10–30 nm, driven by a long-pulse-width excimer laser. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Bollanti, S. – PersonEntity: Name: NameFull: Bonfigli, F. – PersonEntity: Name: NameFull: Burattini, E. – PersonEntity: Name: NameFull: Di Lazzaro, P. – PersonEntity: Name: NameFull: Flora, F. – PersonEntity: Name: NameFull: Grilli, A. – PersonEntity: Name: NameFull: Letardi, T. – PersonEntity: Name: NameFull: Lisi, N. – PersonEntity: Name: NameFull: Marinai, A. – PersonEntity: Name: NameFull: Mezi, L. – PersonEntity: Name: NameFull: Murra, D. – PersonEntity: Name: NameFull: Zheng, C. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 03 Text: 2003 Type: published Y: 2003 Identifiers: – Type: issn-print Value: 09462171 Numbering: – Type: volume Value: 76 – Type: issue Value: 3 Titles: – TitleFull: Applied Physics B: Lasers & Optics Type: main |
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