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A Self-Aligned a-IGZO Thin-Film Transistor Using a New Two-Photo-Mask Process with a Continuous Etching Scheme.

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Title: A Self-Aligned a-IGZO Thin-Film Transistor Using a New Two-Photo-Mask Process with a Continuous Etching Scheme.
Authors: Ching-Lin Fan1,2 clfan@mail.ntust.edu.tw, Ming-Chi Shang1 d10019004@mail.ntust.edu.tw, Bo-Jyun Li1 m10019004@mail.ntust.edu.tw, Yu-Zuo Lin2 D9802312@mail.ntust.edu.tw, Shea-Jue Wang3 sjwang@ntut.edu.tw, Win-Der Lee4 leewd@mail.lit.edu.tw
Source: Materials (1996-1944). Aug2014, Vol. 7 Issue 8, p5761-5768. 8p. 1 Color Photograph, 1 Diagram, 1 Chart, 3 Graphs.
Database: Academic Search Ultimate
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DbLabel: Academic Search Ultimate
An: 97747035
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PubType: Academic Journal
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  Data: A Self-Aligned a-IGZO Thin-Film Transistor Using a New Two-Photo-Mask Process with a Continuous Etching Scheme.
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  Data: <searchLink fieldCode="AR" term="%22Ching-Lin+Fan%22">Ching-Lin Fan</searchLink><relatesTo>1,2</relatesTo><i> clfan@mail.ntust.edu.tw</i><br /><searchLink fieldCode="AR" term="%22Ming-Chi+Shang%22">Ming-Chi Shang</searchLink><relatesTo>1</relatesTo><i> d10019004@mail.ntust.edu.tw</i><br /><searchLink fieldCode="AR" term="%22Bo-Jyun+Li%22">Bo-Jyun Li</searchLink><relatesTo>1</relatesTo><i> m10019004@mail.ntust.edu.tw</i><br /><searchLink fieldCode="AR" term="%22Yu-Zuo+Lin%22">Yu-Zuo Lin</searchLink><relatesTo>2</relatesTo><i> D9802312@mail.ntust.edu.tw</i><br /><searchLink fieldCode="AR" term="%22Shea-Jue+Wang%22">Shea-Jue Wang</searchLink><relatesTo>3</relatesTo><i> sjwang@ntut.edu.tw</i><br /><searchLink fieldCode="AR" term="%22Win-Der+Lee%22">Win-Der Lee</searchLink><relatesTo>4</relatesTo><i> leewd@mail.lit.edu.tw</i>
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  Data: <searchLink fieldCode="JN" term="%22Materials+%281996-1944%29%22">Materials (1996-1944)</searchLink>. Aug2014, Vol. 7 Issue 8, p5761-5768. 8p. 1 Color Photograph, 1 Diagram, 1 Chart, 3 Graphs.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=97747035
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      – Type: doi
        Value: 10.3390/ma7085761
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      – Code: eng
        Text: English
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        PageCount: 8
        StartPage: 5761
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      – TitleFull: A Self-Aligned a-IGZO Thin-Film Transistor Using a New Two-Photo-Mask Process with a Continuous Etching Scheme.
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            NameFull: Ching-Lin Fan
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            NameFull: Ming-Chi Shang
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            NameFull: Bo-Jyun Li
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            NameFull: Yu-Zuo Lin
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            NameFull: Shea-Jue Wang
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              M: 08
              Text: Aug2014
              Type: published
              Y: 2014
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              Value: 7
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