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Multiple structural forms of a vacancy in silicon as evidenced by vacancy profiles produced by rapid thermal annealing.

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Bibliographic Details
Title:	Multiple structural forms of a vacancy in silicon as evidenced by vacancy profiles produced by rapid thermal annealing.
Authors:	Voronkov, Vladimir¹, Falster, Robert¹
Source:	Physica Status Solidi (B). Nov2014, Vol. 251 Issue 11, p2179-2184. 6p.
Database:	Academic Search Ultimate

Description
ISSN:	03701972
DOI:	10.1002/pssb.201400014