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Selective Coating Deposition on High-Q Single-crystal Silicon Resonators for the Investigation of Thermal Noise Statistical Properties.

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Title: Selective Coating Deposition on High-Q Single-crystal Silicon Resonators for the Investigation of Thermal Noise Statistical Properties.
Authors: Serra, E.1,2 eserra@fbk.eu, Bonaldi, M.3, Borrielli, A.3, Conti, L.4, Pandraud, G.2, Sarro, P.M.2
Source: Procedia Engineering. 2014, Vol. 87, p1485-1488. 4p.
Subjects: Surface coatings, Single crystals, Electric resonators, Electric properties of silicon, Thermal noise
Abstract: Silicon resonators are widely used in a large class of applications including sensing and actuation, signal processing and energy harvesting. Very often, their application as sensors requires the deposition of metallic thin films or dielectric coatings, to set the electrical conductivity, the optical coupling, or other physical-chemical properties of the device. Invariably coatings degrade the quality factor (Q) of resonance by increasing the amount of energy dissipated during vibration. In this paper, we show a class of resonators used for the investigation of thermal noise statistical properties in non-thermodynamic equilibrium. Design strategies to preserve the silicon Q-factor are discussed. [ABSTRACT FROM AUTHOR]
Copyright of Procedia Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
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DbLabel: Engineering Source
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PubType: Academic Journal
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  Data: Silicon resonators are widely used in a large class of applications including sensing and actuation, signal processing and energy harvesting. Very often, their application as sensors requires the deposition of metallic thin films or dielectric coatings, to set the electrical conductivity, the optical coupling, or other physical-chemical properties of the device. Invariably coatings degrade the quality factor (Q) of resonance by increasing the amount of energy dissipated during vibration. In this paper, we show a class of resonators used for the investigation of thermal noise statistical properties in non-thermodynamic equilibrium. Design strategies to preserve the silicon Q-factor are discussed. [ABSTRACT FROM AUTHOR]
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  Label:
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  Data: <i>Copyright of Procedia Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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