Injection-lock technology fires 450 mm excimer laser lithographic engine.
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| Title: | Injection-lock technology fires 450 mm excimer laser lithographic engine. |
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| Authors: | HITOMI FUKUDA1 hitomi_fukuda@gigaphoton.com |
| Source: | Laser Focus World. Jul2014, Vol. 50 Issue 7, p43-47. 3p. |
| Subjects: | Ultraviolet lithography, Injection locked oscillators, Wafer-scale integration of circuits, Industrial applications of excimer lasers, Gigaphoton Inc. |
| Abstract: | The article discusses the characteristic of ultraviolet lithography laser engine with injection-lock technology. Topics discussed include the specification of GigaTwin ultraviolet (UV) lithography laser platform such as the gas and electricity utilization of the laser is lesser and ecologically viable for high-volume, the demand on the use of 450 mm wafer production, and the launch of injection-locked GT60A ArF excimer laser by Gigaphoton, a technology manufacturing company. |
| Database: | Engineering Source |
| FullText | Links: – Type: pdflink Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 100790069 AccessLevel: 6 PubType: Periodical PubTypeId: serialPeriodical PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Injection-lock technology fires 450 mm excimer laser lithographic engine. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22HITOMI+FUKUDA%22">HITOMI FUKUDA</searchLink><relatesTo>1</relatesTo><i> hitomi_fukuda@gigaphoton.com</i> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Laser+Focus+World%22">Laser Focus World</searchLink>. Jul2014, Vol. 50 Issue 7, p43-47. 3p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Ultraviolet+lithography%22">Ultraviolet lithography</searchLink><br /><searchLink fieldCode="DE" term="%22Injection+locked+oscillators%22">Injection locked oscillators</searchLink><br /><searchLink fieldCode="DE" term="%22Wafer-scale+integration+of+circuits%22">Wafer-scale integration of circuits</searchLink><br /><searchLink fieldCode="DE" term="%22Industrial+applications+of+excimer+lasers%22">Industrial applications of excimer lasers</searchLink><br /><searchLink fieldCode="DE" term="%22Gigaphoton+Inc%2E%22">Gigaphoton Inc.</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: The article discusses the characteristic of ultraviolet lithography laser engine with injection-lock technology. Topics discussed include the specification of GigaTwin ultraviolet (UV) lithography laser platform such as the gas and electricity utilization of the laser is lesser and ecologically viable for high-volume, the demand on the use of 450 mm wafer production, and the launch of injection-locked GT60A ArF excimer laser by Gigaphoton, a technology manufacturing company. |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=100790069 |
| RecordInfo | BibRecord: BibEntity: Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 3 StartPage: 43 Subjects: – SubjectFull: Ultraviolet lithography Type: general – SubjectFull: Injection locked oscillators Type: general – SubjectFull: Wafer-scale integration of circuits Type: general – SubjectFull: Industrial applications of excimer lasers Type: general – SubjectFull: Gigaphoton Inc. Type: general Titles: – TitleFull: Injection-lock technology fires 450 mm excimer laser lithographic engine. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: HITOMI FUKUDA IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 07 Text: Jul2014 Type: published Y: 2014 Identifiers: – Type: issn-print Value: 10438092 Numbering: – Type: volume Value: 50 – Type: issue Value: 7 Titles: – TitleFull: Laser Focus World Type: main |
| ResultId | 1 |
