Injection-lock technology fires 450 mm excimer laser lithographic engine.
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| Title: | Injection-lock technology fires 450 mm excimer laser lithographic engine. |
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| Authors: | HITOMI FUKUDA1 hitomi_fukuda@gigaphoton.com |
| Source: | Laser Focus World. Jul2014, Vol. 50 Issue 7, p43-47. 3p. |
| Subjects: | Ultraviolet lithography, Injection locked oscillators, Wafer-scale integration of circuits, Industrial applications of excimer lasers, Gigaphoton Inc. |
| Abstract: | The article discusses the characteristic of ultraviolet lithography laser engine with injection-lock technology. Topics discussed include the specification of GigaTwin ultraviolet (UV) lithography laser platform such as the gas and electricity utilization of the laser is lesser and ecologically viable for high-volume, the demand on the use of 450 mm wafer production, and the launch of injection-locked GT60A ArF excimer laser by Gigaphoton, a technology manufacturing company. |
| Database: | Engineering Source |
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