Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy.
Saved in:
| Title: | Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy. |
|---|---|
| Authors: | Krstulović, N.1 niksak@ifs.hr, Salamon, K.1 ksalamon@ifs.hr, Modic, M.2 martina.modic@ijs.si, Bišćan, M.1 mbiscan@ifs.hr, Milat, O.1 milat@ifs.hr, Milošević, S.1 slobodan@ifs.hr |
| Source: | Spectrochimica Acta Part B. May2015, Vol. 107, p67-74. 8p. |
| Subjects: | Pulsed lasers, Titanium, Thin films, Plasma dynamics, Kinetic energy, Emission spectroscopy, Atomic force microscopy |
| Abstract: | In this paper, dynamics of double-pulse laser produced t itanium plasma was studied both directly using optical emission spectroscopy (OES) and indirectly from morphological properties of deposited thin films. Both approaches yield consistent results. Ablated material was deposited in a form of thin film on the Si substrate. During deposition, plasma dynamics was monitored using optical emission spectroscopy with spatial and temporal resolutions. The influence of ablation mode (single and double) and delay time τ (delay between first and second pulses in double-pulse mode) on plasma dynamics and consequently on morphology of deposited Ti-films was studied using X-ray reflectivity and atomic force microscopy. Delay time τ was varied from 170 ns to 4 μs. The results show strong dependence of both emission signal and Ti-film properties, such as thickness, density and roughness, on τ . In addition, correlation of average density and thickness of film is observed. These results are discussed in terms of dependency of angular distribution and kinetic energy of plasma plume particles on τ . Advantages of using double-pulse laser deposition for possible application in thin film production are shown. [ABSTRACT FROM AUTHOR] |
| Copyright of Spectrochimica Acta Part B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
|---|---|
| Header | DbId: egs DbLabel: Engineering Source An: 102114489 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
| IllustrationInfo | |
| Items | – Name: Title Label: Title Group: Ti Data: Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Krstulović%2C+N%2E%22">Krstulović, N.</searchLink><relatesTo>1</relatesTo><i> niksak@ifs.hr</i><br /><searchLink fieldCode="AR" term="%22Salamon%2C+K%2E%22">Salamon, K.</searchLink><relatesTo>1</relatesTo><i> ksalamon@ifs.hr</i><br /><searchLink fieldCode="AR" term="%22Modic%2C+M%2E%22">Modic, M.</searchLink><relatesTo>2</relatesTo><i> martina.modic@ijs.si</i><br /><searchLink fieldCode="AR" term="%22Bišćan%2C+M%2E%22">Bišćan, M.</searchLink><relatesTo>1</relatesTo><i> mbiscan@ifs.hr</i><br /><searchLink fieldCode="AR" term="%22Milat%2C+O%2E%22">Milat, O.</searchLink><relatesTo>1</relatesTo><i> milat@ifs.hr</i><br /><searchLink fieldCode="AR" term="%22Milošević%2C+S%2E%22">Milošević, S.</searchLink><relatesTo>1</relatesTo><i> slobodan@ifs.hr</i> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Spectrochimica+Acta+Part+B%22">Spectrochimica Acta Part B</searchLink>. May2015, Vol. 107, p67-74. 8p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Pulsed+lasers%22">Pulsed lasers</searchLink><br /><searchLink fieldCode="DE" term="%22Titanium%22">Titanium</searchLink><br /><searchLink fieldCode="DE" term="%22Thin+films%22">Thin films</searchLink><br /><searchLink fieldCode="DE" term="%22Plasma+dynamics%22">Plasma dynamics</searchLink><br /><searchLink fieldCode="DE" term="%22Kinetic+energy%22">Kinetic energy</searchLink><br /><searchLink fieldCode="DE" term="%22Emission+spectroscopy%22">Emission spectroscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Atomic+force+microscopy%22">Atomic force microscopy</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: In this paper, dynamics of double-pulse laser produced t itanium plasma was studied both directly using optical emission spectroscopy (OES) and indirectly from morphological properties of deposited thin films. Both approaches yield consistent results. Ablated material was deposited in a form of thin film on the Si substrate. During deposition, plasma dynamics was monitored using optical emission spectroscopy with spatial and temporal resolutions. The influence of ablation mode (single and double) and delay time τ (delay between first and second pulses in double-pulse mode) on plasma dynamics and consequently on morphology of deposited Ti-films was studied using X-ray reflectivity and atomic force microscopy. Delay time τ was varied from 170 ns to 4 μs. The results show strong dependence of both emission signal and Ti-film properties, such as thickness, density and roughness, on τ . In addition, correlation of average density and thickness of film is observed. These results are discussed in terms of dependency of angular distribution and kinetic energy of plasma plume particles on τ . Advantages of using double-pulse laser deposition for possible application in thin film production are shown. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Spectrochimica Acta Part B is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=102114489 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.sab.2015.02.008 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 8 StartPage: 67 Subjects: – SubjectFull: Pulsed lasers Type: general – SubjectFull: Titanium Type: general – SubjectFull: Thin films Type: general – SubjectFull: Plasma dynamics Type: general – SubjectFull: Kinetic energy Type: general – SubjectFull: Emission spectroscopy Type: general – SubjectFull: Atomic force microscopy Type: general Titles: – TitleFull: Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Krstulović, N. – PersonEntity: Name: NameFull: Salamon, K. – PersonEntity: Name: NameFull: Modic, M. – PersonEntity: Name: NameFull: Bišćan, M. – PersonEntity: Name: NameFull: Milat, O. – PersonEntity: Name: NameFull: Milošević, S. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 05 Text: May2015 Type: published Y: 2015 Identifiers: – Type: issn-print Value: 05848547 Numbering: – Type: volume Value: 107 Titles: – TitleFull: Spectrochimica Acta Part B Type: main |
| ResultId | 1 |
