APA (7th ed.) Citation

Pan, C. R., Qiao, Y., Zhou, M. C., & Wu, N. Q. (2015). Scheduling and Analysis of Start-Up Transient Processes for Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Transactions on Semiconductor Manufacturing, 28(2), 160. https://doi.org/10.1109/TSM.2015.2390644

Chicago Style (17th ed.) Citation

Pan, Chun Rong, Yan Qiao, Meng Chu Zhou, and Nai Qi Wu. "Scheduling and Analysis of Start-Up Transient Processes for Dual-Arm Cluster Tools With Wafer Revisiting." IEEE Transactions on Semiconductor Manufacturing 28, no. 2 (2015): 160. https://doi.org/10.1109/TSM.2015.2390644.

MLA (9th ed.) Citation

Pan, Chun Rong, et al. "Scheduling and Analysis of Start-Up Transient Processes for Dual-Arm Cluster Tools With Wafer Revisiting." IEEE Transactions on Semiconductor Manufacturing, vol. 28, no. 2, 2015, p. 160, https://doi.org/10.1109/TSM.2015.2390644.