Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints.
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| Title: | Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints. |
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| Authors: | Qiao, Yan1, Pan, Chun-Rong2, Wu, Nai-Qi3, Zhou, MengChu4 |
| Source: | IEEE Transactions on Automation Science & Engineering. Jul2015, Vol. 12 Issue 3, p1125-1139. 15p. |
| Subjects: | Semiconductor wafers, Failure analysis, Semiconductor manufacturing, Feasibility studies, Petri nets, Steady-state responses |
| Abstract: | In semiconductor manufacturing, wafer residency time constraints make the scheduling problem of cluster tools complicated. A process module (PM) in cluster tools is prone to failure. It is crucial to deal with any such failure in a proper and timely manner. If there are feasible periodic schedules in operating a cluster tool before and after a PM failure, it is desired to make it operate continuously when such a failure occurs. However, due to wafer residency time constraints, it is highly challenging to control a tool such that it can be correctly transferred from a feasible schedule before failure to another after it. To solve this problem, a Petri net model is developed to describe the dynamic behavior of a single-arm cluster tool and failure response policies are proposed. The proposed policies are formulated via simple control laws for their easy implementation. Examples are given to show them. [ABSTRACT FROM PUBLISHER] |
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| Database: | Engineering Source |
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