Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics.
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| Title: | Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics. |
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| Authors: | Serra, E.1,2,3 eserra@fbk.eu, Bonaldi, M.3,4, Borrielli, A.3,4, Marin, F.5,6, Marconi, L.5, Marino, F.6,7, Pandraud, G.2, Pontin, A.5,6, Prodi, G.A.8, Sarro, P.M.2 |
| Source: | Microelectronic Engineering. Sep2015, Vol. 145, p138-142. 5p. |
| Subjects: | Fabrication (Manufacturing), Optical MEMS, Resonators, Optomechanics, Laser beams |
| Abstract: | The study of the optomechanical coupling between the radiation pressure of a laser beam and a mechanical oscillator is an emerging field in quantum optics that is taking advantage of all the recent developments in micro-fabrication. The manipulation of the quantum state of light is within the reach of systems based on a Fabry–Perot cavity with a Micro-Opto-Mechanical-System (MOMS) resonators used as end-mirror. To approach the quantum regime, these micro devices must satisfy two basic requirements: low optical and mechanical losses. We have recently proposed a class of very low loss MOMS devices working in the 100 kHz frequency region, based on two-side MEMS processing bulk-micromachining. In this work we describe our latest process development, based on the used of pure aluminum as a masking layer for the optical coating during fabrication, that significantly improves the quality of the devices and the yield of the process, opening the way for their use in integrated systems for quantum optics. The devices show very high optical quality (finesse up to 10 5 can be achieved in optical cavity) and a mechanical quality factor over 10 6 at cryogenic temperatures. [ABSTRACT FROM AUTHOR] |
| Copyright of Microelectronic Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| Database: | Engineering Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: egs DbLabel: Engineering Source An: 109104398 AccessLevel: 6 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Serra%2C+E%2E%22">Serra, E.</searchLink><relatesTo>1,2,3</relatesTo><i> eserra@fbk.eu</i><br /><searchLink fieldCode="AR" term="%22Bonaldi%2C+M%2E%22">Bonaldi, M.</searchLink><relatesTo>3,4</relatesTo><br /><searchLink fieldCode="AR" term="%22Borrielli%2C+A%2E%22">Borrielli, A.</searchLink><relatesTo>3,4</relatesTo><br /><searchLink fieldCode="AR" term="%22Marin%2C+F%2E%22">Marin, F.</searchLink><relatesTo>5,6</relatesTo><br /><searchLink fieldCode="AR" term="%22Marconi%2C+L%2E%22">Marconi, L.</searchLink><relatesTo>5</relatesTo><br /><searchLink fieldCode="AR" term="%22Marino%2C+F%2E%22">Marino, F.</searchLink><relatesTo>6,7</relatesTo><br /><searchLink fieldCode="AR" term="%22Pandraud%2C+G%2E%22">Pandraud, G.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Pontin%2C+A%2E%22">Pontin, A.</searchLink><relatesTo>5,6</relatesTo><br /><searchLink fieldCode="AR" term="%22Prodi%2C+G%2EA%2E%22">Prodi, G.A.</searchLink><relatesTo>8</relatesTo><br /><searchLink fieldCode="AR" term="%22Sarro%2C+P%2EM%2E%22">Sarro, P.M.</searchLink><relatesTo>2</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Microelectronic+Engineering%22">Microelectronic Engineering</searchLink>. Sep2015, Vol. 145, p138-142. 5p. – Name: Subject Label: Subjects Group: Su Data: <searchLink fieldCode="DE" term="%22Fabrication+%28Manufacturing%29%22">Fabrication (Manufacturing)</searchLink><br /><searchLink fieldCode="DE" term="%22Optical+MEMS%22">Optical MEMS</searchLink><br /><searchLink fieldCode="DE" term="%22Resonators%22">Resonators</searchLink><br /><searchLink fieldCode="DE" term="%22Optomechanics%22">Optomechanics</searchLink><br /><searchLink fieldCode="DE" term="%22Laser+beams%22">Laser beams</searchLink> – Name: Abstract Label: Abstract Group: Ab Data: The study of the optomechanical coupling between the radiation pressure of a laser beam and a mechanical oscillator is an emerging field in quantum optics that is taking advantage of all the recent developments in micro-fabrication. The manipulation of the quantum state of light is within the reach of systems based on a Fabry–Perot cavity with a Micro-Opto-Mechanical-System (MOMS) resonators used as end-mirror. To approach the quantum regime, these micro devices must satisfy two basic requirements: low optical and mechanical losses. We have recently proposed a class of very low loss MOMS devices working in the 100 kHz frequency region, based on two-side MEMS processing bulk-micromachining. In this work we describe our latest process development, based on the used of pure aluminum as a masking layer for the optical coating during fabrication, that significantly improves the quality of the devices and the yield of the process, opening the way for their use in integrated systems for quantum optics. The devices show very high optical quality (finesse up to 10 5 can be achieved in optical cavity) and a mechanical quality factor over 10 6 at cryogenic temperatures. [ABSTRACT FROM AUTHOR] – Name: AbstractSuppliedCopyright Label: Group: Ab Data: <i>Copyright of Microelectronic Engineering is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1016/j.mee.2015.03.036 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 5 StartPage: 138 Subjects: – SubjectFull: Fabrication (Manufacturing) Type: general – SubjectFull: Optical MEMS Type: general – SubjectFull: Resonators Type: general – SubjectFull: Optomechanics Type: general – SubjectFull: Laser beams Type: general Titles: – TitleFull: Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Serra, E. – PersonEntity: Name: NameFull: Bonaldi, M. – PersonEntity: Name: NameFull: Borrielli, A. – PersonEntity: Name: NameFull: Marin, F. – PersonEntity: Name: NameFull: Marconi, L. – PersonEntity: Name: NameFull: Marino, F. – PersonEntity: Name: NameFull: Pandraud, G. – PersonEntity: Name: NameFull: Pontin, A. – PersonEntity: Name: NameFull: Prodi, G.A. – PersonEntity: Name: NameFull: Sarro, P.M. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 09 Text: Sep2015 Type: published Y: 2015 Identifiers: – Type: issn-print Value: 01679317 Numbering: – Type: volume Value: 145 Titles: – TitleFull: Microelectronic Engineering Type: main |
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