View in EDS

Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation.

Saved in:
Bibliographic Details
Title: Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation.
Authors: García, G.1 ggarcia@cells.es, Preda, I.1, Díaz-Híjar, M.2,3, Tormo-Márquez, V.3, Peña-Rodríguez, O.4, Olivares, J.2,3, Bosia, F.5,6, Pugno, N.M.7,8,9, Picollo, F.5,6, Giuntini, L.10, A. Sordini, null11, Olivero, P.5,6, López-Mir, L.12, Ocal, C.12
Source: Diamond & Related Materials. Oct2016, Vol. 69, p1-7. 7p.
Subjects: Ion beams, Irradiation, Diamond films, Heavy ions, Atomic force microscopy, Crystallography
Abstract: This paper presents experimental data and analysis of the structural damage caused by swift-heavy ion irradiation of single-crystal diamond. The patterned buried structural damage is shown to generate, via swelling, a mirror-pattern on the sample surface, which remains largely damage-free. While extensive results are available for light ion implantations, this effect is reported here for the first time in the heavy ion regime, where a completely different range of input parameters (in terms of ion species, energy, stopping power, etc.) is available for customized irradiation. The chosen ion species are Au and Br, in the energy range 10–40 MeV. The observed patterns, as characterized by profilometry and atomic force microscopy, are reported in a series of model experiments, which show swelling patterns ranging from a few nm to above 200 nm. Moreover, a systematic phenomenological modeling is presented, in which surface swelling measurements are correlated to buried crystal damage. A comparison is made with data for light ion implantations, showing good compatibility with the proposed models. The modeling presented in this work can be useful for the design and realization of micropatterned surfaces in single crystal diamond, allowing generating highly customized structures by combining appropriately chosen irradiation parameters and masks. [ABSTRACT FROM AUTHOR]
Copyright of Diamond & Related Materials is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: Engineering Source
FullText Text:
  Availability: 0
Header DbId: egs
DbLabel: Engineering Source
An: 118496703
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22García%2C+G%2E%22">García, G.</searchLink><relatesTo>1</relatesTo><i> ggarcia@cells.es</i><br /><searchLink fieldCode="AR" term="%22Preda%2C+I%2E%22">Preda, I.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Díaz-Híjar%2C+M%2E%22">Díaz-Híjar, M.</searchLink><relatesTo>2,3</relatesTo><br /><searchLink fieldCode="AR" term="%22Tormo-Márquez%2C+V%2E%22">Tormo-Márquez, V.</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AR" term="%22Peña-Rodríguez%2C+O%2E%22">Peña-Rodríguez, O.</searchLink><relatesTo>4</relatesTo><br /><searchLink fieldCode="AR" term="%22Olivares%2C+J%2E%22">Olivares, J.</searchLink><relatesTo>2,3</relatesTo><br /><searchLink fieldCode="AR" term="%22Bosia%2C+F%2E%22">Bosia, F.</searchLink><relatesTo>5,6</relatesTo><br /><searchLink fieldCode="AR" term="%22Pugno%2C+N%2EM%2E%22">Pugno, N.M.</searchLink><relatesTo>7,8,9</relatesTo><br /><searchLink fieldCode="AR" term="%22Picollo%2C+F%2E%22">Picollo, F.</searchLink><relatesTo>5,6</relatesTo><br /><searchLink fieldCode="AR" term="%22Giuntini%2C+L%2E%22">Giuntini, L.</searchLink><relatesTo>10</relatesTo><br /><searchLink fieldCode="AR" term="%22A%2E+Sordini%2C+null%22">A. Sordini, null</searchLink><relatesTo>11</relatesTo><br /><searchLink fieldCode="AR" term="%22Olivero%2C+P%2E%22">Olivero, P.</searchLink><relatesTo>5,6</relatesTo><br /><searchLink fieldCode="AR" term="%22López-Mir%2C+L%2E%22">López-Mir, L.</searchLink><relatesTo>12</relatesTo><br /><searchLink fieldCode="AR" term="%22Ocal%2C+C%2E%22">Ocal, C.</searchLink><relatesTo>12</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Diamond+%26+Related+Materials%22">Diamond & Related Materials</searchLink>. Oct2016, Vol. 69, p1-7. 7p.
– Name: Subject
  Label: Subjects
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Ion+beams%22">Ion beams</searchLink><br /><searchLink fieldCode="DE" term="%22Irradiation%22">Irradiation</searchLink><br /><searchLink fieldCode="DE" term="%22Diamond+films%22">Diamond films</searchLink><br /><searchLink fieldCode="DE" term="%22Heavy+ions%22">Heavy ions</searchLink><br /><searchLink fieldCode="DE" term="%22Atomic+force+microscopy%22">Atomic force microscopy</searchLink><br /><searchLink fieldCode="DE" term="%22Crystallography%22">Crystallography</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: This paper presents experimental data and analysis of the structural damage caused by swift-heavy ion irradiation of single-crystal diamond. The patterned buried structural damage is shown to generate, via swelling, a mirror-pattern on the sample surface, which remains largely damage-free. While extensive results are available for light ion implantations, this effect is reported here for the first time in the heavy ion regime, where a completely different range of input parameters (in terms of ion species, energy, stopping power, etc.) is available for customized irradiation. The chosen ion species are Au and Br, in the energy range 10–40 MeV. The observed patterns, as characterized by profilometry and atomic force microscopy, are reported in a series of model experiments, which show swelling patterns ranging from a few nm to above 200 nm. Moreover, a systematic phenomenological modeling is presented, in which surface swelling measurements are correlated to buried crystal damage. A comparison is made with data for light ion implantations, showing good compatibility with the proposed models. The modeling presented in this work can be useful for the design and realization of micropatterned surfaces in single crystal diamond, allowing generating highly customized structures by combining appropriately chosen irradiation parameters and masks. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Diamond & Related Materials is the property of Elsevier B.V. and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=egs&AN=118496703
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.diamond.2016.06.015
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 7
        StartPage: 1
    Subjects:
      – SubjectFull: Ion beams
        Type: general
      – SubjectFull: Irradiation
        Type: general
      – SubjectFull: Diamond films
        Type: general
      – SubjectFull: Heavy ions
        Type: general
      – SubjectFull: Atomic force microscopy
        Type: general
      – SubjectFull: Crystallography
        Type: general
    Titles:
      – TitleFull: Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: García, G.
      – PersonEntity:
          Name:
            NameFull: Preda, I.
      – PersonEntity:
          Name:
            NameFull: Díaz-Híjar, M.
      – PersonEntity:
          Name:
            NameFull: Tormo-Márquez, V.
      – PersonEntity:
          Name:
            NameFull: Peña-Rodríguez, O.
      – PersonEntity:
          Name:
            NameFull: Olivares, J.
      – PersonEntity:
          Name:
            NameFull: Bosia, F.
      – PersonEntity:
          Name:
            NameFull: Pugno, N.M.
      – PersonEntity:
          Name:
            NameFull: Picollo, F.
      – PersonEntity:
          Name:
            NameFull: Giuntini, L.
      – PersonEntity:
          Name:
            NameFull: A. Sordini, null
      – PersonEntity:
          Name:
            NameFull: Olivero, P.
      – PersonEntity:
          Name:
            NameFull: López-Mir, L.
      – PersonEntity:
          Name:
            NameFull: Ocal, C.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 10
              Text: Oct2016
              Type: published
              Y: 2016
          Identifiers:
            – Type: issn-print
              Value: 09259635
          Numbering:
            – Type: volume
              Value: 69
          Titles:
            – TitleFull: Diamond & Related Materials
              Type: main
ResultId 1