APA (7th ed.) Citation

Sidorov, D. S., Chkhalo, N. I., Mikhailenko, M. S., Pestov, A. E., & Polkovnikov, V. N. (2016). Sputtering of carbon using hydrogen ion beams with energies of 60–800 eV. Nuclear Instruments & Methods in Physics Research Section B, 387, 73. https://doi.org/10.1016/j.nimb.2016.10.007

Chicago Style (17th ed.) Citation

Sidorov, Dmitry S., Nikolay I. Chkhalo, Mikhail S. Mikhailenko, Alexey E. Pestov, and Vladimir N. Polkovnikov. "Sputtering of Carbon Using Hydrogen Ion Beams with Energies of 60–800 EV." Nuclear Instruments & Methods in Physics Research Section B 387 (2016): 73. https://doi.org/10.1016/j.nimb.2016.10.007.

MLA (9th ed.) Citation

Sidorov, Dmitry S., et al. "Sputtering of Carbon Using Hydrogen Ion Beams with Energies of 60–800 EV." Nuclear Instruments & Methods in Physics Research Section B, vol. 387, 2016, p. 73, https://doi.org/10.1016/j.nimb.2016.10.007.

Warning: These citations may not always be 100% accurate.