APA (7th ed.) Citation

Samadi, H., Pfeffer, M., Altmann, R., Leibold, A., Gumprecht, T., & Bauer, A. (2016). Particle Free Handling of Substrates. IEEE Transactions on Semiconductor Manufacturing, 29(4), 314. https://doi.org/10.1109/TSM.2016.2596980

Chicago Style (17th ed.) Citation

Samadi, Hassan, Markus Pfeffer, Roswitha Altmann, Andreas Leibold, Thomas Gumprecht, and Anton Bauer. "Particle Free Handling of Substrates." IEEE Transactions on Semiconductor Manufacturing 29, no. 4 (2016): 314. https://doi.org/10.1109/TSM.2016.2596980.

MLA (9th ed.) Citation

Samadi, Hassan, et al. "Particle Free Handling of Substrates." IEEE Transactions on Semiconductor Manufacturing, vol. 29, no. 4, 2016, p. 314, https://doi.org/10.1109/TSM.2016.2596980.